 |
| Modification of Discrete Parts, Catheters, Tubing |
| 1.5 ft3 |
| Side Wall |
| Six removable shelves on 1.5-inch centers. Shelf spacing can be customized based on part size. |
| Microprocessor controller or Allen Bradley HMI-PLC stores from ten to 600 process recipes, each capable of up to five separate steps. |
| 500 watts |
200, 200, 50 sccm.
*Optional liquid injection systems available. |
27 cfm.
*Optional scroll or dry pump package available. |
|
Chamber |
|
 |
 |
| Modification of Discrete Parts, Catheters, Tubing |
| 3.5 ft3 |
| Side Wall |
| Nine removable shelves on 1.5-inch centers. Shelf spacing can be customized based on part size. |
| Microprocessor controller or Allen Bradley HMI-PLC stores from ten to 600 process recipes, each capable of up to five separate steps. |
| 500-1000 watts |
| 1000, 1000, 100 sccm; Fourth MFC plus multiple gas plumbing available. Liquid injection available on all systems. |
180 cfm pumping system, prepared for O2 service including oil mist eliminator and oil filtration unit.
*Dry pump packages available. |
|
Chamber |
|
|
 |
| Modification of Discrete Parts, Catheters, Tubing |
| 4.8 ft3 |
| Side Wall |
| Nine removable shelves on Shelf 2.5-inch centers.Shelf spacing can be customized based on part size. |
| Microprocessor controller or Allen Bradley HMI-PLC stores from ten to 600 process recipes, each capable of up to five separate steps. |
| 1000 watts |
| 1000, 1000, 100 sccm; Fourth MFC plus multiple gas plumbing available. Liquid injection available on all systems. |
180 cfm pumping system, prepared for O2 service including oil mist eliminator and oil filtration unit.
*Dry pump packages available.
|
|
Chamber |
|
|
 |
| Films, wovens, membranes up to 25” width |
| 5 ft3 |
| Vertical multiple parallel plate |
| None. Cartridge system. |
| Microprocessor controller or Allen Bradley HMI-PLC stores from ten to 600 process recipes, each capable of up to five separate steps. |
| 500 watts |
| 1000, 1000, 100 sccm; Fourth MFC plus multiple gas plumbing available. Liquid injection available on all systems. |
180 cfm pumping system, prepared for O2 service including oil mist eliminator and oil filtration unit.
*Dry pump packages available. |
|
Chamber |
|
|
|
| Discrete Parts |
| 5 ft3 |
| Primary plasma driven shelf |
| Three fixed shelves, with four 4.5 inch high working areas |
| Microprocessor controller or Allen Bradley HMI-PLC stores from ten to 600 process recipes, each capable of up to five separate steps. |
| 500 watts |
| 1000, 1000, 100 sccm; Fourth MFC plus multiple gas plumbing available. Liquid injection available on all systems. |
180 cfm pumping system, prepared for O2 service including oil mist eliminator and oil filtration unit.
*Dry pump packages available. |
|
Chamber |
|
|
|
| Multi-geometrical parts, porous material, powders |
| 5 ft3 |
| Center pin, water-cooled |
| None. Rotating “tumbler” basket. Total volume 0.75 cubic feet. |
| Microprocessor controller or Allen Bradley HMI-PLC stores from ten to 600 process recipes, each capable of up to five separate steps. |
| 500 watts |
| 1000, 1000, 100 sccm; Fourth MFC plus multiple gas plumbing available. Liquid injection available on all systems. |
180 cfm pumping system, prepared for O2 service including oil mist eliminator and oil filtration unit.
*Dry pump packages available. |
|
Chamber |
 |
| Modification of continuous profiles of tubing and fiber |
|
Chamber |
 |
| Modification of thin films, fibers and other spooled materials |
|
 |
 |
| Batch modification of materials up to 6 x 4 x 4 feet |
|
 |
 |
| Modification of films, wovens, non-wovens,foils, membranes and fabrics up to 60 inches wide |
|
 |
|
|
